Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors
Electronic Theses of Indian Institute of Science
View Archive InfoField | Value | |
Title |
Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors
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Creator |
Pattnaik, Prasant Kumar
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Subject |
Optoelectromechanical Systems
Pressure Detectors Vibration Detectors Micro Optoelectromechanical Devices Micro Electromechanical Sensors Integrated Optics Micro-Opto-Electro-Mechanical Systems (MOEMS) MEMS Devices MOEM Pressure Sensor MOEM Vibration Sensor MEMS Pressure Sensor MOEM Sensors Electromechanical Engineering |
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Contributor |
Srinivas, T
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Date |
2011-09-09T05:45:03Z
2011-09-09T05:45:03Z 2011-09-09 2005-07 |
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Type |
Thesis
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Identifier |
http://etd.iisc.ernet.in/handle/2005/1414
http://etd.ncsi.iisc.ernet.in/abstracts/1823/G19131-Abs.pdf |
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Language |
en_US
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Relation |
G19131
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