<p>Design of Step down Structure RF-MEMS Shunt Capacitive Switch for Low-Pull-In Voltage</p>
Online Publishing @ NISCAIR
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Title Statement |
<p>Design of Step down Structure RF-MEMS Shunt Capacitive Switch for Low-Pull-In Voltage</p> |
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Added Entry - Uncontrolled Name |
Sravani, K Girija; Department of ECE, National Institute of Technology, Silchar 788 010, India Guha, K ; Department of ECE, National Institute of Technology, Silchar 788 010, India Lysenko, I E; Department of Electronic Apparatuses Design, Southern Federal University, Taganrog 347 922, Russia Rao, K Srinivasa; MEMS Research Center, Department of ECE, Koneru Lakshmaih Education Foundation, Green Fields, Vaddeswaram, Guntur 522 502, India Sinawi, Ameen El; Department of Mechanical Engineering, Khalifa University, Abu Dubai, UAE |
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Uncontrolled Index Term |
Meander Techniques; Perforations; Pull-in Voltage; RF-MEMS Shunt Switch; Spring Constant |
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Summary, etc. |
<p>In this paper, designs and simulations of a new RF MEMS step-down structure of a capacitive shunt switch using different meandering methods are presented. The beam and dielectric materials are taken as gold and silicon nitride for the proposed switch. The switch required actuation voltage is 7.9 V for the non-uniform one meander technique.</p> |
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Publication, Distribution, Etc. |
Journal of Scientific and Industrial Research (JSIR) 2020-11-09 16:10:07 |
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Electronic Location and Access |
application/pdf http://op.niscair.res.in/index.php/JSIR/article/view/40469 |
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Data Source Entry |
Journal of Scientific and Industrial Research (JSIR); ##issue.vol## 79, ##issue.no## 7 |
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Language Note |
en |
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