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<strong>Effect of Annealing and Ion Beam Irradiation on AC Electrical Properties for Gold Sputtered PM-355</strong>

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Title Statement <strong>Effect of Annealing and Ion Beam Irradiation on AC Electrical Properties for Gold Sputtered PM-355</strong>
 
Added Entry - Uncontrolled Name Radwan, Samah I.; Atomic Energy Authority, Egypt
Rashad, Ahmed M; Central Laboratory of Elemental and Isotopic Analysis, NRC, Atomic Energy Authority, Egypt
Tantawy, Hesham R; Chemical Engineering Dept., Military Technical College, Egypt
Abdel Samad, Salam ; Experimental Nuclear Physics Dept., NRC, Atomic Energy Authority, Egypt
 
Uncontrolled Index Term Electrical properties; electrical discharge
Thin film, PM-355, Gold, Sputtering, AC conductivity, Annealing, Dielectric constant, Ion beam,Dielectric loss
 
Summary, etc. Deposition of different gold thickness on PM-355 cleaned by ethanol forming thin films using magnetron sputtering. Gold layer with thickness 300, 400, 500, 700, 1000, 1300, and 1500 nm were deposited to prepare Au / PM-355 thin films. Then, ac electrical properties response of thin films for a wide frequency range 20Hz - 5MHz were measured at room<br />temperature. Meanwhile, the measurements of ac conductivity, dielectric constant, and dielectric loss factor were plotted at different frequencies to determine the optimum thickness. Hence, the comparison was done between optimum Au thickness thin films cleaned by two organic solvents and ethanol before annealing at different frequencies. Also, study the effect of annealing and ion beam that extracted radially from conical anode and disc cathode ion source on optimum Au thickness thin film electrical properties. It is found that the annealing increases both dielectric constant, dielectric loss, and ac conductivity of optimum Au thin film at different frequencies. Despite, the nitrogen ion beam effected on these thin films by decreasing the dielectric constant and ac conductivity for all thin films except the chloroform one. Finally, study the comparison between the annealing and followed by ion irradiation thin films. It is noticed the decrease in ac electrical conductivity and dielectric constant at different frequencies.
 
Publication, Distribution, Etc. Indian Journal of Pure & Applied Physics (IJPAP)
2022-02-16 10:24:46
 
Electronic Location and Access application/pdf
http://op.niscair.res.in/index.php/IJPAP/article/view/27472
 
Data Source Entry Indian Journal of Pure & Applied Physics (IJPAP); ##issue.vol## 60, ##issue.no## 2 (2022): Indian Journal of Pure & Applied Physics
 
Language Note en
 
Nonspecific Relationship Entry http://op.niscair.res.in/index.php/IJPAP/article/download/27472/465484852
 
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