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Effect of Annealing and Ion Beam Irradiation on AC Electrical Properties for Gold Sputtered PM-355

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Title Effect of Annealing and Ion Beam Irradiation on AC Electrical Properties for Gold Sputtered PM-355
 
Creator Radwan, S I
Rashad, A M
Tantawy, H R
Samad, S Abdel
 
Subject Thin film
PM-355
Gold
Sputtering
AC conductivity
Annealing
Dielectric constant
Ion beam
Dielectric loss
 
Description 171-181
Deposition of different gold thickness on PM-355 cleaned by ethanol forming thin films using magnetron sputtering.
Gold layer with thickness 300, 400, 500, 700, 1000, 1300, and 1500 nm were deposited to prepare Au / PM-355 thin films.
Then, ac electrical properties response of thin films for a wide frequency range 20Hz - 5MHz were measured at room
temperature. Meanwhile, the measurements of ac conductivity, dielectric constant, and dielectric loss factor were plotted at
different frequencies to determine the optimum thickness. Hence, the comparison was done between optimum Au thickness
thin films cleaned by two organic solvents and ethanol before annealing at different frequencies. Also, study the effect of
annealing and ion beam that extracted radially from conical anode and disc cathode ion source on optimum Au thickness
thin film electrical properties. It is found that the annealing increases both dielectric constant, dielectric loss, and ac
conductivity of optimum Au thin film at different frequencies. Despite, the nitrogen ion beam effected on these thin films by
decreasing the dielectric constant and ac conductivity for all thin films except the chloroform one. Finally, study the
comparison between the annealing and followed by ion irradiation thin films. It is noticed the decrease in ac electrical
conductivity and dielectric constant at different frequencies.
 
Date 2022-03-04T10:26:12Z
2022-03-04T10:26:12Z
2022-02
 
Type Article
 
Identifier 0975-0959 (Online); 0301-1208 (Print)
http://nopr.niscair.res.in/handle/123456789/59294
 
Language en
 
Publisher NIScPR-CSIR, India
 
Source IJPAP Vol.60(02) [February 2022]