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Dielectric Barrier Discharge Effect on Capacitively Coupled RF Argon Glow Discharge

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Title Dielectric Barrier Discharge Effect on Capacitively Coupled RF Argon Glow Discharge
 
Creator Bouchikhi, A
 
Subject RF glow discharge
Gauss's law
Dielectric barrier discharges
Capacitively coupled
 
Description 163-170
In this work we study the effect of the dielectric barrier discharge (DBDs) on capacitively coupled radio frequency argon glow discharge at low pressure. Firstly, the property discharges are given without DBDs, commenced by means of which exists in the literature in order to validate our code numeric. The model is based on the drift-diffusion approximation. The results with DBDs are mostly affected by means of the surface charge concentrations and the gap voltage. Consequentially, the particle densities, electric potential and electric field, mean electron energy as well as the current densities are totally different compared to those obtained without dielectrics.
 
Date 2022-03-04T10:53:54Z
2022-03-04T10:53:54Z
2022-02
 
Type Article
 
Identifier 0975-0959 (Online); 0301-1208 (Print)
http://nopr.niscair.res.in/handle/123456789/59295
 
Language en
 
Publisher NIScPR-CSIR, India
 
Source IJPAP Vol.60(02) [February 2022]