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<strong>Optimization of structural and optical properties of sputter deposited TiO2 thin films by controlling deposition parameters</strong>

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Title Statement <strong>Optimization of structural and optical properties of sputter deposited TiO2 thin films by controlling deposition parameters</strong>
 
Added Entry - Uncontrolled Name Yadav, Prashant ; Department of Physics CCS University, Meerut - 250004 (UP) India
Sharma, Hitesh Kumar; Department of Physics, CCS University, Meerut, Uttar Pradesh - 250004, India
Singh, Manohar ; Department of Physics, CCS University, Meerut, Uttar Pradesh - 250004, India
Malik, Anil Kumar; Department of Physics, CCS University, Meerut, Uttar Pradesh - 250004, India
Singh, Beer Pal; Department of Physics, CCS University, Meerut, Uttar Pradesh - 250004, India
 
Uncontrolled Index Term Raman Spectroscopy; Thin Films; TiO2;UV –Vis; Spectroscopy; XRD
 
Summary, etc. <p> </p><table class="table itemDisplayTable"><tbody><tr><td class="metadataFieldValue">Titanium oxide (TiO2) thin films have been deposited onto highly cleaned soda lime glass substrates by DC magnetron reactive sputtering system. The Ti target with purity 99.99% is sputtered by argon gas in the sputtering chamber. Oxygen gas with purity 99.99% is introduced during the deposition process into the sputtering chamber as reactive gas for the synthesis of titanium oxide. Structural and optical properties of TiO2 thin films have been characterized by X-ray diffraction (XRD), Raman spectroscopy and UV-Vis. spectroscopy. The effect of substrate temperature and sputtering power on the optical properties of TiO2 thin films has been studied. The XRD and Raman spectroscopy of as-deposited films are used to study the structural properties of TiO2 as a function of substrate temperature and sputtered power. The structural studies show the crystalline nature of TiO2 thin films. The narrowing of energy band gap of sputtered deposited TiO2thin films was studied using UV-Vis. spectroscopy.</td></tr></tbody></table><p> </p>
 
Publication, Distribution, Etc. Indian Journal of Chemical Technology (IJCT)
2022-04-04 13:15:16
 
Electronic Location and Access application/pdf
http://op.niscair.res.in/index.php/IJCT/article/view/54553
 
Data Source Entry Indian Journal of Chemical Technology (IJCT); ##issue.vol## 28, ##issue.no## 6 (2021): Indian Journal of Chemical Technology
 
Language Note en