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<p><strong>Theoretical Analysis of Plasma Parameters on Film Deposition in planer and Cylindrical Magnetron Sputtering</strong></p>

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Title Statement <p><strong>Theoretical Analysis of Plasma Parameters on Film Deposition in planer and Cylindrical Magnetron Sputtering</strong></p>
 
Added Entry - Uncontrolled Name Gupta, Gaurav ; Amity University, Uttar Pradesh, India
Tyagi, R K ; Amity University, Uttar Pradesh, India
 
Uncontrolled Index Term Coating, Morphology, Plasma, Sputtering, Surface
 
Summary, etc. <p class="Abstract">Thin film deposition using plasma sputter is done by experimental methods, though Numerical simulation and theory are capable of generating realistic and useful results. In present exploration a theoretical model for sputtering with consequence of different plasma parameters with the help of electromagnetic lenses for planar (<em>T<sub>p</sub></em>) and cylindrical (<em>T<sub>c</sub></em>) magnetron sputteringhas been conversed. The plasma of helium gas on nickel metal objectwhich contains the velocity shear instability is considered, and <em>T<sub>p</sub></em>,<em>T<sub>c</sub></em>, under the influence of shear scale length(A<sub>i</sub>), homogeneous DC electric field(E<sub>0</sub>), magnetic field (B<sub>0</sub>), density gradient (<em>e</em><em><sub>n</sub></em><em>r</em><em><sub>i</sub></em>) have been evaluated. <em>T<sub>p</sub></em>, and <em>T<sub>c</sub></em>are found to be maximum in the range of 0.815–0.91, and 0.57–0.90, respectively. Also growth rate showed direct relation to E<sub>0</sub> and A<sub>i</sub> but inversely varies with B<sub>0 </sub>and <em>e</em><em><sub>n</sub></em><em>r</em><em><sub>i</sub></em><em>.</em></p>
 
Publication, Distribution, Etc. Indian Journal of Pure & Applied Physics (IJPAP)
2022-10-21 11:23:26
 
Electronic Location and Access application/pdf
http://op.niscair.res.in/index.php/IJPAP/article/view/67745
 
Data Source Entry Indian Journal of Pure & Applied Physics (IJPAP); ##issue.vol## 59, ##issue.no## 3 (2021): Indian Journal of Pure & Applied Physics
 
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