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Field | Value |
Title | Indium doping of silicon using an evaporated indium film source |
Names |
KOLLURI, SV
CHANDORKAR, AN DHAUL, A |
Date Issued | 1993 (iso8601) |
Genre | Note |
Identifier | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,11(5)2849-2850 |