Record Details

DSpace at IIT Bombay

View Archive Info
 

Metadata

 
Field Value
 
Title Multi-frequency transconductance technique for interface characterization of deep sub-micron SOI-MOSFETs
 
Names KUMAR, A
MAHAPATRA, S
LAL, R
RAO, VR
Date Issued 2001 (iso8601)
Abstract A multi-frequency transconductance technique for interface characterization of sub-micron SOI-MOSFETs is implemented. This technique is shown to be highly suitable for interface characterization in Sol devices where conventional charge-pumping techniques cannot be applied. Using this multi-frequency technique, sub-micron SOI-MNSFETs with a SiN dielectric deposited by a novel jet-vapor-deposition (JVD) process are characterized. Results are compared with charge pumping results obtained on bulk MNSFETs with identically processed JVD nitrides. (C) 2001 Elsevier Science Ltd. All rights reserved.
Genre Article; Proceedings Paper
Identifier MICROELECTRONICS RELIABILITY,41(7)1049-1051