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Title A comprehensive trapped charge profiling technique for SONOS flash EEPROMs
 
Names NAIR, PR
BHARATH KUMAR, P
SHARMA, RAVINDER
MAHAPATRA, S
KAMOHARA, S
Date Issued 2004 (iso8601)
Abstract Trapped charge profiles under CHE program of SONOS flash cells are uniquely determined and verified using I-V, GIDL and CP measurements and Monte Carlo simulations. The prospect of profiling using I-V measurement alone is discussed. The inaccuracy associated with conventional CP technique is discussed. The correct method of CP simulation for programmed SONOS devices is shown and programming induced interface-trap generation is estimated.
Genre Article
Topic Monte Carlo Methods
Identifier Proceedings of the IEEE International Electron Devices Meeting Technical Digest, Tokyo, Japan, 13-15 December 2004, 403-406