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Title Channel engineering for sub-micron CMOS technologies
 
Names DIXIT, A
PAL, DK
ROY, JN
RAO, VR
Date Issued 2002 (iso8601)
Abstract In this work, we have applied channel-engineering strategies for the Semiconductor Complex Limited (SCL) 0.8 mum CMOS process and studied the performance advantages using extensive 2-D device simulations. Our results clearly indicate that, with minimum adjustments to the process flow, one can achieve improved performance by appropriate choice of channel engineering techniques.
Genre Proceedings Paper
Topic Mosfet
Identifier PROCEEDINGS OF THE ELEVENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOL 1 & 2,4746,637-640