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| Field | Value |
| Title | Investigation of reverse micro-EDM process for generating high aspect ratio micro-electrode arrays |
| Names |
MASTUD, SA
SINGH, RK JOSHI, SS |
| Date Issued | 2009 (iso8601) |
| Abstract | Deep arrayed micro-hole arrays find applications in air-bearings, inkjet nozzles, micro filters, and single cell manipulation devices. Typically, high aspect ratio micro-electrodes are required for creation of deep blind/through holes. Reverse micro-EDM has the potential for generating high aspect ratio arrayed micro-electrodes. It involves reverse replication of arrayed micro-holes in a plate on to a larger diameter bulk electrode thereby creating high aspect ratio micro-rod arrays. While the process is well-known for its application in the macro-domain, there have been extremely limited studies in its application in the micro-domain. In this work, micro-electrode arrays having different cross-sections and dimensions have been fabricated. A micro-electrode 60 mu m in diameter and an aspect ratio of 33 has been successfully fabricated. Machined micro-electrodes are assessed for geometrical accuracy, surface finish, and surface morphology. The chemical composition of machined rods has been investigated via Energy Dispersive Spectroscopy (EDS). |
| Genre | Proceedings Paper |
| Identifier | 4M/ICOMM 2009 - THE GLOBAL CONFERENCE ON MICRO MANUFACTURE,153-156 |