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Title Sub-threshold swing degradation due to localized charge storage in SONOS memories
 
Names TOMAR, BHAWNA
RAMGOPAL RAO, V
Date Issued 2004 (iso8601)
Abstract This paper discusses the effect of localized charge storage on sub-threshold swing and threshold voltage in silicon-oxide-nitride-oxide-silicon (SONOS) nonvolatile memory cells. By analyzing the change in potential contours, it has been shown that the change in sub-threshold swing is correlated to fringing of electric field lines, and hence to the gate-to-substrate capacitance.
Genre Article
Topic Capacitance
Identifier Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits, Taiwan, 8 July 2004, 251-253