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Ion-beam-induced Modifications of Nanocrystalline ZnO thin Films Grown by Atomic Layer Deposition

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Title Ion-beam-induced Modifications of Nanocrystalline ZnO thin Films Grown by Atomic Layer Deposition
 
Creator Gupta, Deepika
Sharma, Shweta
Upadhyay, Sonica
Sharma, S K
Chauhan, Vishnu
Kumar, Rajesh
 
Subject Atomic Force Microscopy (AFM)
Atomic Layer Deposition (ALD)
Rutherford Backscattering Spectroscopy (RBS)
Swift Heavy Ion (SHI)
X-ray Photoelectron Spectroscopy (XPS)
Zinc Oxide (ZnO)
 
Description 437-446
Irradiation with distinct ions turns out to be an efficacious way to alter the optical, structural, electrical and
morphological properties of different materials by instigating the strains, defects and structural transitions in it. Ion beam
irradiation with Swift Heavy Ion (SHI) can originate defects in the materials by conveying the adequate energy to the
lattice results into materials modifications. We will extensively study how the SHI irradiation influences the Atomic
Layer Deposition (ALD) Grown Zinc Oxide (ZnO) thin films’ distinct characteristics, which may be applicable for
evolving the distinct sensors, capacitors and optical devices based on it. In the present work, the influence of high
electronic energy deposition on the physico-chemical and morphological properties of ZnO thin films synthesized by
ALD technique have been investigated at different fluences. The thin films of ZnO irradiated by 120 MeV Ti9+with a
fluence of 5E11 to 1E13 ions/cm2. Atomic Force Microscopy (AFM) analysis reveals notable grain boundaries and
proposed that the roughness of irradiated thin films alters as compared to pristine thin films. The thickness of ZnO thin
films were estimated by Rutherford backscattering spectroscopy (RBS). Photoluminescence (PL) intensity enhancement
has been remarked in the Ti ion beam treated ZnO thin films samples as compared to pristine specimen. The alterations
of the of Zn 2p and O 1sbinding energy of pristine and ion irradiated thin films were examined by X-ray Photoelectron
Spectroscopy (XPS).
 
Date 2023-08-16T11:57:45Z
2023-08-16T11:57:45Z
2023-08
 
Type Article
 
Identifier 0971-4588 (Print); 0975-1017 (Online)
http://nopr.niscpr.res.in/handle/123456789/62438
https://doi.org/10.56042/ijems.v30i3.3792
 
Language en
 
Publisher NIScPR-CSIR, India
 
Source IJEMS Vol.30(3) [June 2023]