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Annealing-assisted SnO2 Thin Film for Selective Hydrogen Gas Sensor

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Title Annealing-assisted SnO2 Thin Film for Selective Hydrogen Gas Sensor
 
Creator Kumar, Vipin
Gautam, Yogendra K
Adalati, Ravikant
Kumar, Ashwani
Singh, Beer Pal
Mourya, Satyendra Kumar
Verma, Harish
Jangir, Mukesh
 
Subject Hydrogen
Gas sensors
SnO2 thin films
Sputtering
FE-SEM
Selectivity
 
Description 823-829
Today, monitoring and classification of hydrogen gas by metal oxide-based sensors are widely studying to improve
their selectivity and stability. In present work, hydrogen sensing properties of magnetron sputtered deposited pure SnO2 thin
films have been studied. The pure SnO2 thin film was deposited on glass substrate and as-deposited film was annealed at 450 °C for
6 hrs. The annealed SnO2 thin film has crystalline tetragonal structure, granular surface morphology and non-stoichiometry
elemental composition of tin and oxygen vacancies. A higher gas sensing response is obtained for annealed SnO2 thin film
as compare to as-deposited SnO2 thin film.A limit of detection (LOD) ~175 ppb is estimated for annealed SnO2 thin filmbased
sensor. This sensor exhibits fast response and recovery time of 42 s/52 s for 50 and 500 ppm hydrogen gas,
respectively. The sensor is found highly selective towards H2 gas in compare to different gases such as methane, carbon
monoxide and nitrogen dioxide.
 
Date 2023-09-21T05:45:08Z
2023-09-21T05:45:08Z
2023-09
 
Type Article
 
Identifier 0975-0959 (Online); 0301-1208 (Print)
http://nopr.niscpr.res.in/handle/123456789/62567
https://doi.org/10.56042/ijpap.v61i10.319
 
Language en
 
Publisher NIScPR-CSIR,India
 
Source IJPAP Vol.61(10) [October 2023]