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Correlative electron microscopy-atom probe semiconductor datasets for benchmarking atom probe reconstruction

Harvard Dataverse (Africa Rice Center, Bioversity International, CCAFS, CIAT, IFPRI, IRRI and WorldFish)

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Title Correlative electron microscopy-atom probe semiconductor datasets for benchmarking atom probe reconstruction
 
Identifier https://doi.org/10.7910/DVN/FHEXDI
 
Creator Dialameh, Masoud
Porret, Clement
Bender, Hugo
Kundu, Paromita
Richard, Olivier
Melkonyan, Davit
Scheerder, Jeroen E.
Fletcher, Charles
Fleischmann, Claudia
 
Publisher Harvard Dataverse
 
Description This deposit includes a correlative ET and APT dataset of a SiGe multilayer structure, and a correlative electron microscopy and APT dataset of a SiGe finFET-like structure. The aim of this deposit is to provide correlative datasets for validation of APT reconstruction protocols and correlative methods. Data was obtained at imec.
 
Subject Engineering
 
Contributor Fletcher, Charles