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Design and Simulation of Nanorod-Based SAW Gas Sensor to detect Hazardous Gases

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Title Design and Simulation of Nanorod-Based SAW Gas Sensor to detect Hazardous Gases
 
Creator Behera, Basudeba
Bhatkar, Srushti
 
Subject FEM
Lithium niobate
Nanorods
SAW
Gas sensor
 
Description 155-163
The work presents the design, a 2D and 3D finite element method (FEM) simulation, analysis, and optimization of a surface
acoustic wave (SAW) based gas sensor. The simulation of SAW gas sensors with and without the presence of nanorods is
performed. Gas adsorption on a surface causes a change in the mass, modulus, and conductivity of the sensing layer, which
can be accurately, detected using SAW-based gas sensors. The device is constructed using a YZ-cut lithium niobate as a
substrate, which is covered by a 0.2 μm thick intermediate layer upon which ZnO nanorods are present operating at 4 μm
wavelength. Simulations in COMSOL Multiphysics are performed using eigen frequency, time-dependent, and frequency
domain analysis. The materials of the intermediate layer as well as interdigitated transducers (IDTs) and the height of the
nanorods are varied for the optimization of the device. The frequency shift and total displacement were seen to be
significantly improved for the nanorod-based SAW gas sensor device.
 
Date 2024-02-26T09:03:08Z
2024-02-26T09:03:08Z
2024-02
 
Type Article
 
Identifier 0975-0959 (Online); 0301-1208 (Print)
http://nopr.niscpr.res.in/handle/123456789/63408
https://doi.org/10.56042/ijpap.v62i2.7956
 
Language en
 
Publisher NIScPR-CSIR, India
 
Source IJPAP Vol.62(02) [February 2024]