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A comparative investigation for flatness and parallelism measurement uncertainty evaluation using laser interferometry and image processing

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Title A comparative investigation for flatness and parallelism measurement uncertainty evaluation using laser interferometry and image processing
 
Creator Moona, Girija
Singh, Abhishek
Bishnoi, Sunder
Anju
Kumar, Vinod
Sharma, Rina
Kumar, Harish
 
Subject Flatness
Parallelism
Interferometry
Image processing
Uncertainty
 
Description 51-57
Optical flats and parallels are precisely polished surfaces, customarily used as reference standards for quality assurance
of fabricated components in numerous industries. In-line with the quality control, reliable flatness and parallelism
measurements of optical flats and parallels through appropriate measurement methodologies are immensely significant. The
present study describes a comparative investigation for flatness measurement of an optical flat with an effective diameter of
150 mm and parallelism measurement of an optical parallel with an effective diameter of 30 mm, through laser
interferometry and image processing using MATLAB, followed by measurement uncertainty evaluation for perceptive and
subjective confirmation of the measurement process. Outgrowths of both the approaches have been contemplated to be in
significant congruence; the flatness value observed using laser interferometry is 120.50±30 nm whereas the flatness value
observed using image processing is 118±32 nm. The parallelism values using laser interferometry is 0.44±0.009 arc second
and using image processing is 0.36±0.01 arc second.
 
Date 2024-04-02T09:52:26Z
2024-04-02T09:52:26Z
2024-04
 
Type Article
 
Identifier 0975-1017 (Online); 0971-4588 (Print)
http://nopr.niscpr.res.in/handle/123456789/63675
https://doi.org/10.56042/ijems.v31i1.4887
 
Language en
 
Publisher NIScPR-CSIR,India
 
Source IJEMS Vol.31(1) February